http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014144863-A2

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filingDate 2014-03-14^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2014-09-18^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2014144863-A2
titleOfInvention Miniature mems actuator assemblies
abstract In one embodiment, an electrostatic actuator includes a generally planar fixed frame, a generally planar moving frame coupled to the fixed frame by a flexure for substantially coplanar, perpendicular movement relative to the fixed frame, a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moving frame, and an elongated output shaft having opposite input and output ends, the input end being coupled to the moving frame.
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