http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015122425-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_32e7cfbcd94f0bb4309a7945b0bb8ede |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32917 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32972 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N31-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01D7-005 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N22-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2015-02-12^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c235a81a688029f9e16aec4c88822fdf |
| publicationDate | 2015-08-20^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2015122425-A1 |
| titleOfInvention | Plasma processing detection indicator |
| abstract | The present invention provides a plasma processing detection indicator using, as a base material, a fibrous base material or a composite resin base material including a colored pigment. The plasma processing detection indicator prevents minute fiber pieces or colored pigment from being generated in a powdered state from the base material during plasma processing. Specifically, a plasma processing detection indicator is provided that: has at least a color-changing layer that changes color in a plasma processing atmosphere, laminated on some or all of the surface of the base material; and is characterized by (1) the base material being a fibrous base material or a composite resin base material including a colored pigment and (2) having a resin-based or an inorganic-based transparent coating layer that coats the entire surface of the base material, between the base material and the color-changing layer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016065204-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9944061-B2 |
| priorityDate | 2014-02-14^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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