http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015142486-A1

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filingDate 2015-02-24^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94e020b4707a89396405b170b5ee6a5c
publicationDate 2015-09-24^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2015142486-A1
titleOfInvention System and method for all electrical noise testing of mems microphones in production
abstract Systems and methods for electrical testing of noise in a multi-membrane micro-electro-mechanical systems (MEMS) microphone are disclosed. The MEMS system has a test mode that includes placing the microphones' MEMS biasing networks into a reset mode, adjusting the first bias voltage for the first MEMS sensor such that a polarity matches the polarity of the bias voltage of the second MEMS sensor. The MEMS biasing networks are then placed into a sense mode, and a total noise value is obtained for the MEMS microphone system by measurement of the output of the system's preamplifier.
priorityDate 2014-03-17^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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