| abstract |
This excimer laser device is an excimer laser device that receives data on target pulse energy from an external device and that outputs a pulsed laser beam, and may be provided with: at least one amplifier each including a master oscillator, a chamber placed in the optical path of a pulsed laser beam output from the master oscillator, a pair of electrodes placed in the chamber, and a power supply for applying a voltage to the pair of electrodes; and a control unit that, on the basis of the target pulse energy, causes the power supply to stop applying the voltage to the pair of electrodes for one amplifier of the at least one amplifier. |