http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017110837-A1

Outgoing Links

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-00
filingDate 2016-12-21^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_229f6367212fdd65e132deda90689c64
publicationDate 2017-06-29^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2017110837-A1
titleOfInvention Confocal displacement meter
abstract [Problem] To provide a confocal displacement meter capable of reducing measurement error. [Solution] Light of a plurality of wavelengths is emitted by a light projection unit (120). A lens unit (220) is used to generate, in the light emitted by the light projection unit (120), chromatic aberration along the optical axis direction. Furthermore, the light having chromatic aberration is made to converge by the lens unit (220), and a measurement object (S) is irradiated therewith. Light of wavelengths reflected by the surface of the measurement object (S) while focusing, among the light with which the measurement object (S) is irradiated via the lens unit (220), passes through a plurality of pin holes. Displacement of the measurement object (S) is calculated by a calculation processing unit (150), on the basis of the signal intensity of each wavelength of an average signal corresponding to the average intensity of each wavelength of the plurality of rays of light which have passed through the plurality of pin holes.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I754182-B
priorityDate 2015-12-25^^<http://www.w3.org/2001/XMLSchema#date>
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