http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017136763-A1

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filingDate 2017-02-03^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2017-08-10^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2017136763-A1
titleOfInvention Differential mems microphone
abstract The present disclosure relates generally to microphones and related components. One example micro electro mechanical system (MEMS) motor includes a first diaphragm; a second diaphragm that is disposed in generally parallel relation to the first diaphragm, the first diaphragm and second diaphragm forming an air gap there between; and a back plate disposed in the air gap between and disposed in generally parallel relation to the first diaphragm and the second diaphragm.
priorityDate 2016-02-04^^<http://www.w3.org/2001/XMLSchema#date>
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