| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c0efae9bfd49656818488aea119e5f39 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-727
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-7253 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-725
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 |
| filingDate |
2017-02-28^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a451d079f66450c74e41df34555fc87e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64b56affb12a33ef42bfabf0d1e494cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_136f4cb8faab63e536aabb18ddab63b6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd49bd2fc692c63b4ad7d6a05e32ad14 |
| publicationDate |
2017-10-26^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2017183313-A1 |
| titleOfInvention |
Gas supply device, film formation device, gas supply method, production method for carbon film, and manufacturing method for magnetic recording medium |
| abstract |
[Problem] To provide a gas supply device that supplies to a vacuum chamber a sublimable solid organic compound with a large molecular weight. [Solution] One aspect of the present invention is a gas supply device that supplies gas to a vacuum chamber 21, and that is provided with the following: a container 16 that is connected to the vacuum chamber via a first pipe 19; a heating mechanism 20 that heats the container; a sublimable solid organic compound 17 stored in the container; and a carrier gas supply source 11 that is connected to the container via a second pipe 18. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021082692-A1 |
| priorityDate |
2016-04-22^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |