http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017205034-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a6b57d4591c2b87bb7b1450eadf70f1b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32256 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3299 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32229 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32467 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32284 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32247 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2017-05-05^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f268d6a49311168a879c68ce1bdf6c35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11160fa4bf59a19ae88d117e529c2870 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_17dc8ef2bc6f9082dc92e55876272fe3 |
| publicationDate | 2017-11-30^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2017205034-A2 |
| titleOfInvention | Compact microwave plasma applicator utilizing conjoining electric fields |
| abstract | A plasma applicator includes a plasma discharge tube and a microwave cavity at least partially surrounding a portion of the plasma discharge tube. Microwave energy is coupled to the microwave cavity via a coupling iris. At least two orthogonal dimensions of the microwave cavity are selected such that the microwave energy in the microwave cavity propagates in a transverse electric (TE) mode. Primary electric fields generated from the microwave energy combine with an evanescent electric field generated from the coupling iris, such that a combined electric field in the microwave cavity is substantially uniform along the longitudinal axis of the plasma discharge tube. A plurality of radial microwave chokes is disposed over an exterior of the plasma discharge tube. Positions of the microwave chokes are such that microwave energy propagating in the TE mode and a transverse electric magnetic (TEM) mode is attenuated. |
| priorityDate | 2016-05-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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