Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d4f410ca5b68fcb7a44ece73781c7103 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9a00e7745478e8b2a517a78d37ab0830 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2321-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2251-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2251-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-2066 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2251-604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2259-818 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-005 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F23G7-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-68 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F23G7-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-68 |
filingDate |
2018-05-02^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e28ccfa75c529139f56795f1ce00c0c9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18dad3063ee88ade9e3efa977e12673d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da81474c1c0664255ca879425007f34d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e9219e9d84f313e38de1b3d4a02757d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23c9d1b1a1407c01700fe8d3f824f39a |
publicationDate |
2018-11-29^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2018216446-A1 |
titleOfInvention |
Exhaust gas pressure-reducing detoxifying apparatus |
abstract |
The present invention provides an exhaust gas detoxifying apparatus that has high energy utilization efficiency and economic efficiency and that is capable of minimizing use of a dilution nitrogen gas. An exhaust gas pressure-reducing detoxifying apparatus according to the present invention has a reaction cylinder (16) for carrying out decomposing and/or reaction process on an exhaust gas (E) supplied from an exhaust gas generation source (12) via a vacuum pump (14), by heating or exciting the exhaust gas in an exhaust gas processing space (16a) formed therein by means of an electrothermal heater (18) or a plasma. A rear-stage vacuum pump (22) for reducing the pressure from an exhaust port of the vacuum pump (14) to the inside of the reaction cylinder (16) is connected to an exhaust gas outlet (20) side of the reaction cylinder (16). The rear-stage vacuum pump (22) includes a water seal pump, and is provided with a water-washing means (24) for washing the downstream end side of an exhaust gas flow passage of the reaction cylinder (16) by using washing water (W). The washing water (W) supplied from the water-washing means (24) is used as water to seal the rear-stage vacuum pump (22). |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7284546-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11504669-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022101981-A1 |
priorityDate |
2017-05-24^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |