Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_583921455dbbca934ea3541544426ba3 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-06333 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-1501 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-1471 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J3-021 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J1-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-1471 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-073 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J1-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K15-00 |
filingDate |
2019-05-14^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10c4766245d6daa3bff33e007f8abfeb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52d51bbb14080a97ad6f8f036db0f577 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ca751edc78cffa132bddf887fbf8e87 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70e8aa102c49cf06bacc0daf9875bad3 |
publicationDate |
2019-11-21^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2019221119-A1 |
titleOfInvention |
Incidence axis alignment method for electron gun equipped with photocathode, computer program, and electron gun equipped with photocathode |
abstract |
[Problem] To provide a method for automatically adjusting an electron beam emitted from an electron gun equipped with a photocathode to an incidence axis of an electron optical system. [Solution] The problem is solved by an incidence axis alignment method for an electron gun equipped with a photocathode, the electron gun being able to emit a first-state electron beam by irradiating the photocathode with excitation light, and the method comprising at least: an excitation light irradiation step; a first excitation light irradiation position adjustment step for changing a position irradiated with the excitation light of the photocathode to thereby adjust the position irradiated with the excitation light; and an electron beam center detection step for detecting whether or not a center line of the first-state electron beam and an incidence axis of an electron optical system are aligned. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022230488-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022054535-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220149576-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6925090-B1 |
priorityDate |
2018-05-17^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |