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publicationDate 2020-04-30^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2020083552-A1
titleOfInvention Method for manufacturing an electro-acoustic resonator and electro-acoustic resonator device
abstract A seed layer (210) of a noble metal is formed by electrochemical deposition on a metal electrode (111) disposed on a dielectric layer (110,310). The noble metal seed layer allows the deposition of a highly textured piezoelectric layer (320) on the metal electrode.
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