http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020170366-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J133-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J7-38 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J133-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-38 |
| filingDate | 2019-02-20^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ff5b720860e15a6d3421818795d808b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6676acb826e82e48899dd73b5e127908 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_390418b1c673cf6382c7a636fe3e6215 |
| publicationDate | 2020-08-27^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2020170366-A1 |
| titleOfInvention | Manufacturing method for semiconductor device, and expand tape |
| abstract | An expand tape used in a manufacturing method for a semiconductor device, the method comprising: a tape expanding step in which an expand tape is stretched whilst being heated, widening the interval between a plurality of semiconductor chips fixed onto the expand tape from 100µm or less to 300µm or more; an ultraviolet irradiation step in which ultraviolet light is irradiated on the stretched expand tape; and a peeling step in which the expand tape which has been irradiated with ultraviolet light is peeled away from the plurality of semiconductor chips, wherein the peel strength of the expand tape before the ultraviolet irradiation is at least 6N/25mm, and the peel strength after the ultraviolet irradiation is not more than 0.4N/25mm. |
| priorityDate | 2019-02-20^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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