http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021029158-A1

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filingDate 2020-07-03^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ace3671f4e83432a5bd74adc0427be43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3073866b46a488e83b6b70efd93b422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8ee3c9bbc10bbcdf80c7d764460d081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36c04d3ee5dda510cdee2e676388324d
publicationDate 2021-02-18^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2021029158-A1
titleOfInvention Sulfonamide compound, nonionic photoacid generator, and photolithography resin composition
abstract The purpose of the present invention is to provide: a sulfonamide compound which has a high decomposition rate in response to near-ultraviolet rays and which generates a superacid bis-sulfonamide, and which is highly soluble in a resist solvent; a photoacid generator containing the sulfonamide compound; and a photolithography resin composition which contains the photoacid generator and which has high sensitivity to near-ultraviolet rays. The present invention is a sulfonamide compound (A) characterized by being represented by general formula (1) or (2).
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022030107-A1
priorityDate 2019-08-09^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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