| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03627f82d4edc6567f9627df6efdde5d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-948 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G8-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0236 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L61-06 |
| filingDate |
1995-12-21^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_522dcc9ae8bf04672ff3b0cfc51b3341 |
| publicationDate |
1996-07-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-9620965-A1 |
| titleOfInvention |
Metal ion reduction in novolak resins solution in pgmea |
| abstract |
The present invention provides methods for producing water insoluble, aqueous alkali soluble novolak resins having a very low level of metal ions, utilizing treated chelated ion exchange resins to make the neutral ammonium salt or acid form. A method is also provided for producing photoresist composition having a very low level of metal ions from such novolak resins and for producing semiconductor devices using such photoresist compositions. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9719969-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0001487-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5830990-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100412530-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5936071-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5624789-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11400399-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5665517-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5656413-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9827461-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5962183-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5858627-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5750031-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5837417-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0001487-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6048665-A |
| priorityDate |
1994-12-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |