| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_749c68de6a57def4fc1feb253da4d74b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_daa48ed820a7dad29affa51e58caf757 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07342 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 |
| filingDate |
1996-03-18^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_adb00636146cfe00be7d6269d7b1cf5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd4e5cdf188d48dff59a2d55d6de4977 |
| publicationDate |
1996-10-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-9633419-A2 |
| titleOfInvention |
Method of cleaning probe tips of probe cards and apparatus for implementing the method |
| abstract |
The invention relates to a method of cleaning probe cards (1) provided with probe tips (4), in which method the tips (4) are cleaned of a contaminating material by exposing the tips (4) to a cleaning solution (6). According to the invention, the method is characterized in that the tips (4) are dipped in the solution (6) such that only their ends (14) touch the cleaning solution (6). Since the probe tip ends (14) only are dipped in the cleaning solution (6), there is no need for measures to protect the probe card from contamination by the cleaning solution. The inventive method is thus easy to use. The original performance of the probe cards is restored by the cleaning method in practice. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1621893-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108321098-A |
| priorityDate |
1995-04-19^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |