| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6e0bf97fe4d78a76235683ad47ba572f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_53b4d8dc2d32a5494bcbf209d0c8b72d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
1996-08-01^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_102c4b4924eedfe2414226d4abcab253 |
| publicationDate |
1997-07-31^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-9727452-A1 |
| titleOfInvention |
Device and process for measuring two opposite surfaces of a body |
| abstract |
The invention relates to a device and a process by means of which two opposite plane surfaces of a body can be simultaneously interferometrically measured with the light from a radiation source. Partial radiation beams (A, B) with positive and negative angles of diffraction are generated by a beam divider (8) in the form of a diffraction grid from parallel light radiation beams (P) generated via a radiation source (1) and strike the surfaces (90, 91) of the body (9) to be measured and are reflected therefrom. The reflected partial beams (A, B) are caused to interfere with the through partial beam (P) with a zero order of diffraction and the interference images thus produced are digitised and subtracted from one another, thus making it possible to determine the parallelism of the two surfaces (90, 91) of the body. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6560011-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7663746-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6480286-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6414752-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1281040-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1281040-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7009696-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7436506-B2 |
| priorityDate |
1996-01-24^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |