reference/205231037

Predicate	Object
contentType	Journal Article
endingPage	1574
issn	1432-1858 0946-7076
issueIdentifier	5
pageRange	1563-1574
publicationName	Microsystem Technologies
startingPage	1563
bibliographicCitation	Dong J, Long Z, Jiang H, Sun L. Monolithic-integrated piezoresistive MEMS accelerometer pressure sensor with glass-silicon-glass sandwich structure. Microsystem Technologies. 2016 Jun 29;23(5):1563–74. doi: 10.1007/s00542-016-2981-5.
creator	http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_446041e2d2b1d64c1b1d1eb8d3148297 http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_a8883c39648b363852faa57b084c3654 http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_20a70e4ff1b7cd4aef981d162a9681a2 http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_08455b182482e6af46e7ead168458ccc
date	2016-06-29^^<http://www.w3.org/2001/XMLSchema#date>
identifier	https://doi.org/10.1007/s00542-016-2981-5
isPartOf	https://portal.issn.org/resource/ISSN/1432-1858 https://portal.issn.org/resource/ISSN/0946-7076 http://rdf.ncbi.nlm.nih.gov/pubchem/journal/41331
language	English
source	https://scigraph.springernature.com/ https://www.crossref.org/
title	Monolithic-integrated piezoresistive MEMS accelerometer pressure sensor with glass-silicon-glass sandwich structure

Showing number of triples: 1 to 22 of 22.