bibliographicCitation |
Beyer R, Burghardt H, Reich R, Thomas E, Grambole D, Herrmann F, Scholz T, Albrecht J, Zahn DRT, Gessner T. Trapping Behavior of Thin Siliconoxynitride Layers Prepared by Rapid Thermal Processing. MRS Advances. 1996;428():421. doi: 10.1557/proc-428-421. |