reference/25572172

Predicate	Object
contentType	Journal Article
endingPage	10
issn	0003-6935 1539-4522
issueIdentifier	34
pageRange	6901-10
publicationName	Applied Optics
startingPage	6901
bibliographicCitation	Richardson M, Silfvast WT, Bender HA, Hanzo A, Yanovsky VP, Jin F, Thorpe J. Characterization and control of laser plasma flux parameters for soft-x-ray projection lithography. Appl Opt. 1993 Dec 01;32(34):6901–10. doi: 10.1364/ao.32.006901. PMID: 20856543.
creator	http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_779ac7000b12c694515a0be0139eeb25 http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_759c513c15db9b93502387d6796d2217 http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_24f0e16864632d227b415e69828ad8eb http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_e83899eb7cb82789c36e9cead84ba18b http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_654f4ab97fdd90a3b52a253395d5f9e9 http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_ec178f1dc4857573a90701155c4f59fe http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_5f2f561ad95dcdcb9cc83bb401b30a9c
date	1993-12-01^^<http://www.w3.org/2001/XMLSchema#date>
identifier	https://pubmed.ncbi.nlm.nih.gov/20856543 https://doi.org/10.1364/ao.32.006901
isPartOf	http://rdf.ncbi.nlm.nih.gov/pubchem/journal/22496 https://portal.issn.org/resource/ISSN/0003-6935 https://portal.issn.org/resource/ISSN/1539-4522
language	English
source	https://www.crossref.org/ https://pubmed.ncbi.nlm.nih.gov/
title	Characterization and control of laser plasma flux parameters for soft-x-ray projection lithography

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