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Kim HR, Kim GH, Seong NJ, Choi KJ, Kim SK, Yoon SM. Comparative studies on vertical-channel charge-trap memory thin-film transistors using In-Ga-Zn-O active channels deposited by sputtering and atomic layer depositions. Nanotechnology. 2020 Oct 23;31(43):435702. doi: 10.1088/1361-6528/aba46e. PMID: 32647094. |