"Multiple Patterning Layout Compliance with Minimizing Topology Disturbance ..."

Hua-Yu Chang, Iris Hui-Ru Jiang (2019)

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DOI: 10.1145/3299902.3309755

access: closed

type: Conference or Workshop Paper

metadata version: 2019-04-11

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Hua-Yu Chang, Iris Hui-Ru Jiang:
Multiple Patterning Layout Compliance with Minimizing Topology Disturbance and Polygon Displacement. ISPD 2019: 93-100

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