"Subwavelength optical lithography: challenges and impact on physical design."

Andrew B. Kahng, Y. C. Pati (1999)

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DOI: 10.1145/299996.300035

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Andrew B. Kahng, Y. C. Pati:
Subwavelength optical lithography: challenges and impact on physical design. ISPD 1999: 112-119

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