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"Design-for-manufacturability of MEMS convective accelerometers through ..."
Ahmed Amine Rekik et al. (2012)
- Ahmed Amine Rekik, Florence Azaïs, Frédérick Mailly, Pascal Nouet:
Design-for-manufacturability of MEMS convective accelerometers through adaptive electrical calibration strategy. LATW 2012: 1-6
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