"Close-loop self-compensation of the coupling error for silicon ..."

Jianbin Su et al. (2013)

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DOI: 10.1109/NEMS.2013.6559893

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Jianbin Su, Dingbang Xiao, Xuezhong Wu, Zhihua Chen, Zhanqiang Hou:
Close-loop self-compensation of the coupling error for silicon micromachined gyroscope. NEMS 2013: 1010-1013

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