"High precision adaptive control for piezo-actuated stage."

Xinkai Chen, Toshikuni Ozaki (2010)

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DOI: 10.1109/ROBIO.2010.5723541

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-07

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Xinkai Chen, Toshikuni Ozaki:
High precision adaptive control for piezo-actuated stage. ROBIO 2010: 1440-1445

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