| abstract |
A micromechanical component (5) and a method for its production are proposed, the component (5) having a support body (10), in particular a silicon body, and a regionally self-supporting membrane (14) connected to the support body (10). The membrane (14) is further provided on the surface in a cantilevered area with at least one stabilizing element (12 ', 13). The proposed method has the following method steps: a.) Formation of a first area (11) within the support body (10), which comprises at least a first surface area of the support body (10), b.) Formation of a second surface area (12, 12 ', 13) of the support body (10), which lies at least in regions in the first surface region (11), c.) Selective etching of the first region (11) to an adjustable depth with the formation of porous silicon, the second surface region (12, 12 ', 13) is at least almost not etched, d.) Deposition of a membrane layer (14) on the surface of the support body (10), the membrane layer (14) at least in some areas the first porous area (11) and at least in some areas the second surface area (12, 12 ', 13), and e.) Selective removal of the porous first area (11). |