http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102004036433-B4
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0127 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0072 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate | 2004-07-27^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-03-28^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91f25b13e278c93cbe0a613197f1dbb0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8db2e1072c8aec62469b1c5ee2754ac2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af7950ef7afae500ec23c010094d1988 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b873abe11711f42f21961bc72e284c10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed860e74e7096063a126f42064e9f99c |
| publicationDate | 2013-03-28^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102004036433-B4 |
| titleOfInvention | Micromechanical component and method for producing such a component |
| abstract | Micromechanical component with at least one membrane (1), - wherein the membrane (1) is formed in a layer system on a substrate (3) and spans a cavity (2) in the substrate (3), - wherein the layer system comprises at least one on the substrate (3) formed carrier layer (4) for circuit elements (5), and Wherein at least one structured masking layer (6) for defining the circuit elements (5) is formed on the carrier layer (4), - Wherein the masking layer (6) in the region of the membrane (1) is structured so that mechanical stresses that are effective at a vacuum (p = 0 bar) in the cavern (2) in the region of the membrane (1), at least partially compensated become, - wherein the masking layer (6) has a negative chemical intrinsic stress (compressive stress) and that at least one segment (13) of the masking layer (6) is arranged in the middle region of the membrane (1), where process-related "frozen" compressive stresses prevail, characterized in that another masking layer ... |
| priorityDate | 2004-07-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Showing number of triples: 1 to 26 of 26.