| abstract |
The invention provides a micromechanical sensor device and a corresponding manufacturing method. The micromechanical sensor device is equipped with a substrate (1) which has a membrane region (M), wherein on the membrane region (M) a plurality of sensor layer regions (S1-S3) are formed which have a respective structured sensor layer (200; 300; 400) ; and a respective electrode device (L1a, L1b, L2a, L2b, L3a, L3b), via which the sensor layer regions (S1-S3) can be electrically connected outside the membrane region (M), wherein the sensor layer regions (S1-S3) are structured in such a way that they have longitudinal and width dimensions of the order of 1 to 10 microns. |