| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5a231330b7870ecb6f078b3b535ed010 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31732 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-30 |
| filingDate |
2006-04-17^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d36b124c442ea4a44dd65391e21a82c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c3b3c80e747ca3adf0b8d583e45feff |
| publicationDate |
2008-05-08^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-112006001006-T5 |
| titleOfInvention |
Focused ion beam machining method and apparatus for performing the method |
| abstract |
working proceduresnwith a focused ion beam, in which a deposit processingnor an etching treatmentnis performed on a workpiece,nby the workpiecenis irradiated with the focused ion beam, characterized in thatnthe workpiecendeposit-processed or etched-processed,nby emitting the focused ion beam onto an edge of the workpiecenand a dose size of the focusednIon beam is controlled. |
| priorityDate |
2005-04-22^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |