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symbol H01J2237/31732
modified 2013-01-01^^<http://www.w3.org/2001/XMLSchema#date>
title Depositing thin layers on selected microareas
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broader http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-317

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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015079796-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006038137-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5645897-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022068600-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8008207-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5758577-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6345273-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102618852-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008296516-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112006001006-T5
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7659526-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106435530-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200092404-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102006054695-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010135444-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7495245-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10876202-B2
broader http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31733

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