| abstract |
A gas sensor of the pellistor- or tin oxide-type is disclosed which operates at elevated temperatures. It includes a substrate (1), a membrane (2) extending over a well in the substrate, a cover layer (8) over the membrane and a sensor arrangement that includes an electrical heater (3), a pair of spaced-apart counter electrodes (4) and a gas-sensitive layer (6). The cover layer (8) extends the life of the sensor. |