| abstract |
An object of the present invention is to equalize and accelerate propagation delay times of an input signal from an input terminal to the respective gates. n A power MOS transistor includes a plurality of transistor blocks. The transistor blocks are formed by sources being connected to each other by a first electric conductive layer 8 2 , 8 4 , 8 6 and 10, drains being connected to each other by a second electric conductive layer 8 1 , 8 3 , 8 5 and 9, and gates 6 consisting of a continuous semiconductor layer. The transistor has a third electric conductive layer 11 being connected to a gate terminal Gin and laminated on the gates. n According to this invention, the third electric conductive layer laminated on the gates functions to equalize and accelerate propagation delay times of an input signal from an input terminal to the respective gates. By extending that conductive layer to near the center of a principal plane of the gate, the delay time of a gate input signal to the transistor block located at the center of the semiconductor chip can be reduced substantially. |