http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0967638-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76888 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5256 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-525 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 1999-05-31^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5afd376796491d01602103108cd98729 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_498fbe8116b6f30385ed13cd8c39c483 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf499d5bb1b4eb60b9aaa3825fc24823 |
| publicationDate | 1999-12-29^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0967638-A2 |
| titleOfInvention | Semiconductor fuse |
| abstract | A method for forming a semiconductor integratedncircuit having a fuse and an active device. A dielectricnlayer is formed over the fuse and over a contract regionnof the active device. Via holes are formed throughnselected regions of the dielectric layer exposingnunderlying portions of the fuse and underlying portionsnof a contact region of the active device. Annelectrically conductive material is deposited over thendielectric layer and through the via holes onto exposednportions of the fuse and the contact region. Portions ofnthe electrically conductive material deposited onto thenfuse are selectively removed while leaving portions ofnthe electrically conductive material deposited onto thencontact region of the active device. A fill material isndisposed in the one of the fuse, a bottom portion of suchnfilling material being spaced from the fuse. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100413582-B1 |
| priorityDate | 1998-06-24^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
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