| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e415f6f1eeb8706d299ea086326248bf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-423 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-38 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-42 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-38 |
| filingDate |
2003-11-18^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e91697715fb13c4b4e199fd968af01ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10b304cfb33da857d0c597e3cb48c9bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f11a22ed6f65d1f14f267282e594caf8 |
| publicationDate |
2004-05-26^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1422320-A1 |
| titleOfInvention |
Copper electroplating bath |
| abstract |
Copper electroplating baths are provided containing as one or morensuppressor compounds poly(alkylene oxide) random copolymers which arencapable of providing copper filled sub-micron sized apertures free ofnpits and voids. Such copper electroplating baths are useful in thenmanufacture of electronic devices, such as printed wiring boards andnintegrated circuits. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9613858-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10221496-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7905994-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8262894-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2004404-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8388824-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2004404-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8771495-B2 |
| priorityDate |
2002-11-21^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |