http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002009138-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q3-15
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
filingDate 2000-06-21^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c04c0cd41807c989f32246a079a94574
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa5476e5d6c33622b23c8abb7b1b8de7
publicationDate 2002-01-11^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2002009138-A
titleOfInvention Manufacturing method of electrostatic chuck and electrostatic chuck
abstract (57) [Summary] [PROBLEMS] To easily manufacture an electrostatic chuck. SOLUTION: An electrode pattern 2 is formed on a surface of a substrate 1, and thermal spraying is performed on the electrode pattern 2. by this, A thermal spray film 3 is formed along the irregularities of the electrode pattern 2, and the concave portion becomes a helium gas passage 4.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013235879-A
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100913847-B1
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