| abstract |
The number of particles generated by rubbing is reduced by reducing the rubbing that occurs between the attracting surface of the attracting object and the attracting object mounting surface of the electrostatic attracting device when electrostatically attracting the attracted object. It is possible to provide an electrostatic adsorption device capable of greatly reducing In an electrostatic attraction apparatus having at least a support substrate, an electrode formed concentrically on the support substrate, and an insulating layer covering the support substrate and the electrode, an upper surface of the concentric electrode portion. The surface of the insulating layer is a curved surface that is upwardly convex in the radial direction of the support substrate, and the insulating layer between the electrodes is a concave shape. [Selection] Figure 1 |