| abstract |
(57) [Summary] [PROBLEMS] To provide an adsorption fixing device capable of fixing, correcting, transporting and the like without causing a problem such as generation of particles, and a method of manufacturing the same. SOLUTION: In the adsorption fixing apparatus of the present invention, an upper surface of a dielectric 13 constituting a base is used as an adsorption fixing surface for adsorbing and fixing a plate-like sample 1, and a projection or a groove is formed on the adsorption fixing surface to form an uneven surface. The top surface 24 of the convex portion 15 of the uneven surface is used as a holding surface of the plate-shaped sample 1. The top surface 24 and the side surface 25 of the above and the bottom surface 27 of the concave portion 26 of the uneven surface are polished together. |