| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e7962109cd4763907b82b66760cd0ae8 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2002-03-05^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_395b36591c151f827e8bbb7feaeba7ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd6d37d83c80d26e7af133209ecf3ae6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c3bb92ca517a6a5481403988d140297 |
| publicationDate |
2003-09-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003257866-A |
| titleOfInvention |
Manufacturing method of thin film pattern |
| abstract |
(57) Abstract: A method for forming a thin film pattern that is not based on a resist is provided. An oil-repellent-lipophilic pattern or a water-repellent-lipophilic pattern is formed on a substrate surface, and fine droplets of a functional solution atomized by ultrasonic waves are introduced into the surface together with a carrier gas on the surface to form a lipophilic portion. Alternatively, the functional patterning film is formed by attaching the functional patterning film only to the hydrophilic portion. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104488071-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013176222-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018067717-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2013176222-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107256824-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011009726-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019023354-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005331564-A |
| priorityDate |
2002-03-05^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |