| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-314
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-331
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04 |
| filingDate |
2004-05-18^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41589ac1869ad135d89adacc75080959
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ce12a14e5e7c5902bcddb04ec4cf7f1 |
| publicationDate |
2005-12-02^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2005331564-A |
| titleOfInvention |
Method and device for forming thin film pattern |
| abstract |
PROBLEM TO BE SOLVED: To provide a thin film pattern forming method capable of forming a fine thin film pattern easily and with high definition in a short time and a device having the thin film pattern obtained by this forming method To do. A process for forming a self-assembled monolayer on a substrate and a self-assembled monolayer with a laser beam that has been emitted from a laser light source and then passed through a master to produce a predetermined interference pattern. And forming a thin film pattern 55 by selectively disposing a thin film material on the self assembled monomolecular film pattern 52. Method for forming a thin film pattern. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011155080-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015056551-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013131722-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012186278-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4660761-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2014148011-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007017921-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2006041153-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4611316-B2 |
| priorityDate |
2004-05-18^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |