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publicationDate 2004-01-08^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2004006645-A
titleOfInvention Method for manufacturing piezoelectric element, piezoelectric element, and droplet discharge recording head
abstract A method of manufacturing a piezoelectric element capable of manufacturing a piezoelectric element by a simple process at a low cost is provided. An upper electrode is formed by directly applying a pattern of a liquid containing metal fine particles onto a piezoelectric layer by an ink jet head, and then performing a heat treatment to convert the liquid to a metal film. Do. [Selection] Fig. 6
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