| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9df90d7822cc480ce12c480f4089e229 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D185-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-56 |
| filingDate |
2003-09-09^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8bc6a8519c86647c6b0b3db99a9e52c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fac398f9171706d7e568e7520b593794 |
| publicationDate |
2004-05-13^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004137475-A |
| titleOfInvention |
Method for producing borazine-based resin, borazine-based resin composition, insulating film and method for forming the same |
| abstract |
PROBLEM TO BE SOLVED: To provide an insulating film or the like which has a small amount of metallic impurities and can sufficiently suppress generation of a leak current. SOLUTION: Interlayer insulating films 5, 7 (insulating coating) provided in a memory capacitor cell 8 are formed between a gate electrode 3 provided on a silicon wafer 1 and a counter electrode 8C. The interlayer insulating films 5 and 7 include, for example, a borazine-based resin composition containing an organosilicon borazine-based polymer and ethylbenzene, having a solid content concentration of 0.5% by mass or more and a metal impurity content of 30 ppm or less. The product is obtained by spin coating and drying. [Selection diagram] Fig. 4 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104981518-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014105959-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008266196-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9947858-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011102402-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9879126-B2 |
| priorityDate |
2002-09-26^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |