http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005140516-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-097 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-0802 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-097 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 |
| filingDate | 2003-11-04^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_401f4a55ea712403538dae43f93f5d61 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd61b1fce14117753e9d21ce61f11167 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f51e11dffda91335cc1e4f090368af63 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d74fd176b6fed083c6c88ccd41030bcd |
| publicationDate | 2005-06-02^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005140516-A |
| titleOfInvention | Vibration type piezoelectric acceleration sensor element and vibration type piezoelectric acceleration sensor using the same |
| abstract | A vibration type piezoelectric acceleration sensor element capable of stably detecting static and dynamic acceleration detection without being affected by environmental resistance changes such as noise, and capable of safely running control even in severe temperature change environments. And a vibration type piezoelectric acceleration sensor using the same. SOLUTION: A frame 31, at least one diaphragm 23a inside the frame 31, a support 33 holding the diaphragm 23a, and holding for holding the support 33 so as to reciprocate in a linear direction. And a configuration that detects the acceleration by changing the natural frequency of the diaphragm 23a by propagating to the support 33 through the holding section 32 that moves in the linear direction and expanding and contracting the diaphragm 23a. Since the vibration type piezoelectric acceleration sensor element 35 can obtain a high resonance frequency change rate by acceleration, the acceleration can be detected with high accuracy without being affected by the temperature change. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006308291-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7168321-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009080069-A |
| priorityDate | 2003-11-04^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
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