| abstract |
(57) [Summary] [Problem] To provide a resonance type acceleration sensor which is applicable to a semiconductor process and is not affected by temperature change, noise mixing, etc. SOLUTION: An inertial body 2 that is movable by acceleration, a support beam 3 that supports the inertial body 2 and is deformed when the inertial body 2 is moved, an excitation portion 4 of a piezoelectric element installed adjacent to the support beam 3, and a piezoelectric element. A resonator 7 having a receiver 5 and a propagator 6 is provided, and when an acceleration is applied, a change in the vibration state caused by the deformation of the resonator 7 corresponding to the deformation of the support beam 3 is input to the exciter 4. Detected by the signal and the output signal from the receiving unit 5, An acceleration sensor for measuring the applied acceleration, This is an acceleration sensor represented by a configuration in which the wiring pattern connecting to the support beam 3 and the resonator 7 formed on the vicinity thereof is symmetrical. |