http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005191352-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44ff3005508304394801e265e503b811 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K1-06 |
| filingDate | 2003-12-26^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35f1c40ad505e5fe027dac9790bac674 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78a551480a74fd905ba2a57834a59bbc |
| publicationDate | 2005-07-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005191352-A |
| titleOfInvention | Method for regenerating substrate with multilayer reflective film, method for manufacturing substrate with multilayer reflective film, and method for manufacturing reflective mask blanks |
| abstract | A method for regenerating a substrate with a multilayer reflective film, which does not require a large-scale device, reduces damage to the substrate due to peeling and removal of the multilayer reflective film, and reduces the re-polishing process load, thereby reducing the regeneration cost of the substrate. I will provide a. A substrate with a multilayer reflective film in which a multilayer reflective film formed by alternately laminating Mo and Si is formed on a substrate is selected from hydrofluoric acid, hydrofluoric acid, and ammonium hydrogen fluoride. An aqueous solution containing at least one fluorine compound and an oxidizing agent comprising hydrogen peroxide, or at least one fluorine compound selected from potassium fluoride, sodium fluoride and iodine fluoride, and sulfuric acid, nitric acid and hydrogen peroxide. The multilayer reflective film is peeled off from the substrate by contacting with a stripping solution made of an aqueous solution containing at least one selected oxidizing agent. As a contact method with the stripping solution, the multilayer reflective film-coated substrate 4 inserted in the holder 3 is immersed in the stripping solution 2 in the treatment tank 1. The surface of the substrate from which the multilayer reflective film has been peeled is polished again. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011127221-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017181733-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I494682-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007101349-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102109756-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101757924-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016031451-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011227260-A |
| priorityDate | 2003-12-26^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Showing number of triples: 1 to 59 of 59.