| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F6-00 |
| filingDate |
2005-09-28^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d3bc47946bf3675db76302883aceb2a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2a9aacf507db12b95a8f92ddad3e63f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ecab0f10a4e527450b6638b5ea685f3 |
| publicationDate |
2006-05-18^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006126818-A |
| titleOfInvention |
Chemically amplified resist composition |
| abstract |
[PROBLEMS] To not only greatly reduce the number of defects on a resist coating film with excellent filtration characteristics, but also to greatly reduce defects on the resist coating film due to deterioration of the resist solution over time, and long-term storage stability There is provided a solution for a semiconductor coating film having: A semiconductor coating comprising a treated resin (1) obtained by contacting a crude resin (1) with activated carbon at 40 to 90 ° C. and then contacting with a diatomaceous earth and / or silica gel. Membrane solution. The semiconductor coating film solution as described above, wherein the semiconductor coating film solution is a chemically amplified resist composition and contains an acid generator and a solvent together with the treated resin (1). [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010082232-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009282331-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8753793-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010159399-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012013880-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009037108-A |
| priorityDate |
2004-09-28^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |