| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f8cfa5aee4410611b5c562275c9f8e3 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D69-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
2007-08-03^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75af11bcf590e1f29acf022c69c364f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_503616f732fbff30ea74dd40fe3cf249 |
| publicationDate |
2009-02-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009037108-A |
| titleOfInvention |
Method for producing resin solution for photoresist, photoresist composition and pattern forming method |
| abstract |
【Task】 An object of the present invention is to provide a photoresist composition having good filterability that enables uniform pattern formation, and is a resin solution for photoresist that is stable for a long period of time, that is, has a filtration performance even when stored for a long period of time. An object of the present invention is to provide a photoresist resin solution that does not decrease. [Solution] The present invention relates to a photoresist resin characterized by filtering a solution containing a photoresist resin that becomes alkali-soluble by an acid at 30 to 90 ° C. by heating and aging for 30 minutes or more, and then filtering with a filter medium having a pore diameter of 1 μm or less. A method for producing a solution is provided. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010082232-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010204306-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8753793-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2434343-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9551935-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101748903-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015064602-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014038142-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013011785-A1 |
| priorityDate |
2007-08-03^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |