abstract |
PROBLEM TO BE SOLVED: To provide an inexpensive ceramic sintered body having high thermal conductivity as an electrically insulating material and a manufacturing method thereof. SOLUTION: A green sheet is prepared from a slurry obtained by mixing magnesium nitride powder with aluminum nitride powder, a sintering aid, a plasticizer and a solvent, and a green body is formed from the green sheet, and the green body is inactive. Sinter in atmosphere. In the manufactured high thermal conductive ceramic sintered body 3, magnesium oxide particles 1 are dispersed in a matrix phase 2 mainly composed of an aluminum nitride sintered body 4. [Selection] Figure 1 |