http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008072094-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38b04dac5e5700071e574cb587f8e099 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_30208fce9ca36e03cb3cb8a1259170bc |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2007-07-30^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a4f490ad7339cdfc6215f755e4fb03d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc60a2ba2dcf20ae22b44130deca0f41 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf4cc5c84d7b199cc9d8dfcea1ac6edb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c09da57fc4f9973f68446991980b73a5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9ba73e9c78feb4fa5b2a719457dc170 |
| publicationDate | 2008-03-27^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008072094-A |
| titleOfInvention | Semiconductor wafer polishing composition, method for producing the same, and polishing method |
| abstract | Provided is a semiconductor wafer polishing composition that hardly causes particle contamination, particularly “abrasive grain residue”, in a flat portion of a wafer or the like when polishing a flat surface or an edge portion of a device wafer or the like. Colloidal silica stabilized by a quaternary ammonium base produced by an active silicate aqueous solution obtained by removing an alkali from an alkali silicate aqueous solution and a quaternary ammonium base, containing no alkali metal, 25 Contains a buffer solution combining a weak acid and a quaternary ammonium base having a reciprocal of the acid dissociation constant at ° C (pKa) of 8.0 to 12.5, and has a buffering action at 25 ° C between pH 8-11 A composition for polishing a semiconductor wafer. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101250346-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101250343-B |
| priorityDate | 2006-08-14^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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