| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G25-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G29-00 |
| filingDate |
2008-12-11^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_730f5d0d03f5363d0bffa103c1fe9cc1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6aaabd9b7e92315d21c12d2bd37712b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba2e5a6ae765f130d8dc951aebba4d41 |
| publicationDate |
2009-05-28^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009117852-A |
| titleOfInvention |
Ceramic film, manufacturing method thereof, semiconductor device, piezoelectric element and actuator |
| abstract |
A method of manufacturing a ceramic film capable of improving the surface morphology of the ceramic film is provided. A ceramic film obtained by this method for producing a ceramic film is provided. Provided are a semiconductor device and a piezoelectric element to which the ceramic film is applied. A method of manufacturing a ceramic film includes a step of crystallizing a raw material body 20 to form a ceramic film 30. The raw material body 20 includes different types of raw materials in a mixed state, and the types are different. The raw materials are in a relationship in which at least one of crystal growth conditions and crystal growth mechanism in crystallization of the raw materials is different from each other. [Selection] Figure 1 |
| priorityDate |
2000-06-21^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |