| abstract |
(57) [Problem] To control crystal orientation by performing post-annealing on crystallization of thin-film ceramics, where crystal nuclei serving as starting points of crystallization are generated throughout the amorphous film. However, the problem is that the characteristics of the device are poor. SOLUTION: When forming a ceramic thin film on a substrate, layers having a lower crystallization temperature than the substrate side are sequentially provided. In addition, a ceramic thin film having a structure composed of such a material is used. |